The probe card is used during the semiconductor wafer inspection process. Due to the mechanisms, all types of probes generate, accumulate, and pick up debris to some extent which in turn increases the contact resistance. Hence, after a certain period of use, the probe needles must be cleaned to maintain their optimum performance. It is important to clean the tips of the probes which is a key factor in prolonging the life of these expensive probe cards. Mipox Corporation, Japan offers the best cleaning sheets for the probe card that can be used for On-Line Probe cleaning.
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